As expected with XPS, chemical effects could easily be determined. The estimated maximum amounts were below those anticipated from the implant conditions.
It was found that each technique had its own set of advantages, and both approaches gave roughly comparable profiles. Depth profiles were obtained with both XPS and AES, and the instrument-based quantitative analysis computer routines were used with slight modifications. In this study Mg was implanted into metal foils at various levels. Also, in some instances overlapping peaks can cause problems. The peak-to-peak height of the electron-excited AES peak can vary with the chemical state of Mg. With XPS, the Al X-ray-excited Mg KLL peak has a relative intensity that is greater than the 2s transition, but not with Mg radiation.
With both techniques the relative sensitivity is low for the main transition usually employed, i.e., the 2s photoemission line in XPS and the KLL transition in electron-excited AES.
The analysis of depth profiles when magnesium is present gives rise to several analytical problems with either X-ray photoelectron spectroscopy (XPS) or Auger electron spectroscopy (AES).
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